Motion Control – Case Study: Custom Linear Modules – Lithography Masking!

Motion Control – Custom Linear Modules

motion control - custom stages

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Woburn, MA –Motion Control Components Ball Screws – Case Study –
Multi-Axis Motion for Lithography Masking

Challenge

A leading supplier of laser processing equipment to the semiconductor industry wanted a next generation masking system for extreme UV lithography. The customer approached Steinmeyer with a demanding set of requirements. The motion system needed flexibility to provide fine adjustment during processing and coarse movement into a service position outside the optical path. Travel of 160mm was required in the horizontal axis and 50mm in the vertical axis, with speeds up to 50mm/sec and repeatability of better than 2 microns. The mask also needed to tilt as much as 1.5 degrees around the optical axis. Finally, the dry nitrogen atmosphere and strict boundaries on contamination levels made the choice of materials and lubricants challenging.

 

Steinmeyer Mechatronik, a division of Steinmeyer, designed an innovative multi-drive configuration. It features stainless steel, 12 x 5 preloaded ball screws. Two vertical drives enable both translation and tilt. A stage supporting both vertical drives moves the mask horizontally. The mask frame with the associated pivot points are magnetically preloaded, which enables easy service plus backlash-free tilt. Further, the motor encoder assembly is easily detachable for quick servicing.

motion control - Ball screws

motion control - case study

Special design elements regarding coatings and ball screw lubricants were also incorporated to address demands unique to this application. An eUV absorbent coating was applied on all internal surfaces to minimize signal scattering. Also, a highly specialized lubricant was selected. This PFPE oil is chemically stable under eUV exposure while exhibiting extremely low outgassing. It is also thermally stable, nonflammable, and insoluble in water, acids, bases, and most organic solvents.

 

To Download a PDF of this Case Study Go To – https://ballscrew-tech.com/2019/06/27/case-study-multi-axis-motion-challenge-solved-by-innovative-ball-screw-design/

 

The Result

The customer completed the full acceptance testing of the system. They are thrilled by the combination of coarse and fine movement in one mechanism. Plus, the system greatly speeds their process of mask testing.

motion control - steinmeyer ball screws

About Steinmeyer

Steinmeyer is the world’s longest continuously-operating manufacturer of commercial ball screws. In the realm of linear motion control, our company has become synonymous with precision, innovation, and exacting standards of quality.

Steinmeyer’s extensive product line is used widely in drive systems for industrial machines as well as precision positioning in optical instruments, medical devices, and other mechatronic applications.

Contact Steinmeyer for further information on their extensive product portfolio:

781-273-6220

infoUSA@steinmeyer.com

Visit steinmeyer.com/

Steinmeyer Ball Screw Resource Center

 

Other Interesting Case Studies from Steinmeyer:

For the Case Study “Wearable Pumps” CLICK HERE

For the Case Study “Pipetting” CLICK HERE


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Steinmeyer Ball Screw Blog

 

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Motion Control Components – Maxon’s New IDX Integrated Servo Motor – Power at the Press of a Button!

Motion Control – Integrated Servo Motor

motion control - integrated servo motor


motion control - ElectromateVaughan, Ontario, Canada — Motion Control Components — Maxon’s new IDX compact integrated servo gearmotor + drive combines a powerful, brushless EC-i motor and an EPOS4 positioning controller, which can be complemented with a maxon planetary gearhead when required. This integrated motor stands out for its high torque density, high efficiency, maintenance-free components, and a high-quality industrial housing providing IP65 protection. The IDX also features configurable digital and analog inputs and outputs, and intuitive software enabling easy commissioning and integration into master systems.

The IDX integrated servo motor yields extremely high continuous torques and high-power density. Its compact size makes the IDX more efficient than current solutions on the market. The unit’s high-quality design is complemented with an IP65-protected housing.

Maxon IDX integrated servo motors are suitable for use across the entire speed range (from standstill to maximum speed) and have an extremely high overload capability. Together with its internal positioning controller and integrated single turn absolute encoder, absolute positioning is standard.

The IDX motors have a large functional scope for systems with an operating voltage from 12 to 48 VDC. As such they are extremely flexible for use in industrial, robotics, AGV (Automated Guided Vehicles) and logistics applications with the most stringent of requirements, such as autonomous transport systems.

motion control - integrated gearmotor
CLICK HERE to view information on Maxon’s new IDX compact integrated servo gearmotor + drive

About Electromate:

Electromate’s Core Purpose is to help Manufacturers build better machines using differentiated automation technology. They specialize in Robotic and Mechatronic Solutions for the Industrial Automation marketplace. Respected by customers as a premiere source for High Performance Automation and Motion Control Components & Systems, Electromate® specializes in AC & DC Servo and Stepper Motors & Drives, Motion & Automation Controllers, Positioning Systems & Actuators, Feedback Devices, Gearing Products and HMI’s & Operator Displays, all supported via extensive product selection, just-in-timedelivery, dedicated customer service and technical engineering support.

More on Electromate can be found at

Website: http://www.electromate.com

LinkedIn: https://www.linkedin.com/company-beta/209277/

Twitter: https://twitter.com/Electromate

Facebook: https://www.facebook.com/electromateindustrial/

Blog: https://electromate.wordpress.com/

 

motion control - electromate

For more information on the “Best Place to Work”CLICK HERE!

To view Electromate’s new corporate video CLICK HERE

 

 

For further information on this new product or others in our extensive product portfolio, call 1-877-SERVO99 (737-8699) or e-mail Warren Osak at sales@electromate.com or visit Electromate at: www.electromate.com


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Motion Control – Select from the Large Variety of Precision XYZ Axis Stages to Suit Your Specific Application from Optimal Engineering Systems, Inc. (OES)!

Motion Control –  XYZ Axis Stages to Suit  Specific Applications!

motion control - OES

 


motion control - oesThe two-phase stepper motors are standard with a knob for manual adjustment. The knob can be replaced with an incremental quadrature encoder for position verification. An optional three-phase brushless servo motor with optical encoder is also offered for closed loop operation and higher operating speeds. The standard pitch of the lead screw is 4 mm that can be replaced with1 mm per turn lead screw for higher resolution.Van Nuys, CA – — Motion Control – OES (Optimal Engineering Systems) has introduced a series of high precision, low cost XYZ positioning stages that can be easily integrated into new and existing applications. They are offered in 5 travel lengths for each axis, 50 mm (1.969 in.), 100 mm (3.937 in.), 150 mm (5.906 in.), 200 mm (7.874 in.), and 300 mm (11.811 in.). Any combination of lengths, motors, and lead screws are available.

These highly adaptable XYZ axis stages feature high precision steel linear ball bearings and hardened steel shafting, and each stage has a 3.543 in. by 3.543 in. (90 mm by 90 mm) table with a precise pattern of threaded mounting holes. These series is also offered with a locking brake for the Z-axis.

The stages are compatible with OES’ line of motion controllers and are available as a complete Plug-and-Play system. X and XY axis Linear Stages can also be specified.

About OES – Optimal Engineering Systems, Inc. (OES) is a manufacturer of motion control products including: Stepper motor controllers and drivers, solenoid electronics, and positioning stages and slides. Applications include: Animation, automated assembly systems, automation, CNC machines, flight simulation, inspection systems, linear and rotary stages, machine tools, medical devices, motion control camera boom systems, optical comparators, CMMs, pan-tilt gimbals, PCB assembly & inspection, pick-and-place, positioning stages, robotics, scanners, security cameras, telescope drive mechanisms, time-lapse photography and winders.

Some of the industries OES serves are: Aerospace, Astronomy, Chemical, Communications, Educational Institutes, University, Colleges, Government Agencies, National Labs, Manufacturing, Medical, Metrology, Military, Motion Control, Museum, News Agencies, Semiconductor and Test Equipment. Optimal Engineering Systems, Inc’s. competitive advantage is its state-of-the-art in-house manufacturing facility in North America enabling OES to supply clients with custom designed orders or high volume just-in-time deliveries globally.

For additional information, contact sales team at: OES, 6901 Woodley Ave.; Van Nuys, CA 91406; Telephone: 888-777-1826 or +1 818-222-9200, FAX +1 818-436-0446 or E-Mail: sales@oesincorp.com or visit the website at http://www.oesincorp.com


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