Motion Control – Open Frame XY-Rotary Systems from Intellidrives!

Intellidrives Motion Control Components - ARC Series XY Rotary TablesMotion Control Components - Intellidrives-Logo


Philadelphia, PA, — Motion Control Components and Systems – Open-frame low profile XY-Rotary stages designed for wafer handling and many other automated accurate positioning applications in semiconductor manufacturing industries. XY drive mechanism located on the side of the unit and large center hole-through rotary table offer a clear unobstruced access to the wafer from both sides.


Unit XY-OF-UL-200×200+








XY table


XY-OF-UL-200×200 XY-OF-UL-280×280 XY-OF-UL-350×350


Rotary table ACR-160UT ACR-260UT ACR-335UT
Motor type brushless servo motor /encoder (standard)

linear servo motor (option)

XY stroke mm x mm


200 x 200  

280 x 280



350 x 350


Angular rotation deg – 360 -360 -360
Center aperture dia


160 260 335
Resolution (linear) µ 1 (note 1,2)

2.5 (note 3)

1 (note 1,2)

2.5 (note 3)

1 (note 1,2)

2.5 (note 3)

Resolution (rotary) arc-


-1.4 -1 -0.9
Repeatability (linear) µ 5 (note 3)

1 (notes 1,2)

Repeatability (rotary) arc-


Speed mm/


400  (note 3)

800  (note 2)

Load weight kg 30
Stage weight kg 16 22 28

(note 1)     with linear encoder (option)

(note 2)     with linear servo  motor (option)

(note 3)     ball screw 10 mm lead, brushless servo driven

For additional information on unit XY-OF-UL-200×200+ACR160UT CLICK HERE!

For additional information on unit XY-OF-UL-280×280+ACR260UT CLICK HERE!

For additional information on unit XY-OF-UL-350×350+ACR335UT CLICK HERE!

About IntelLiDrives

IntelLiDrives, Inc. manufactures linear actuators, XY tables and rotary tables for the industry, government, science and research institutions around the world. Our precision rotary actuators, XY stages and linear actuators are used in the applications in medical devices, life sciences, semiconductor and electronic assembly manufacturing, data storage, laser processing, military/aerospace, photonics, automotive and test assembly, research and development and other industries requiring high precision and throughput motion control solutions.

For further information on this new product or others in our extensive product portfolio, call 1-215-728-6804 or e-mail Intellidrives at or go Intellidrive – Contact Us at:

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