ACR-32UT has a very wide dynamic speed range and can move at sub-rpm speed with low velocity ripple and can accelerate quickly to 1,500 rpm.
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Philadelphia, PA, — Motion Control Components and Systems – The ACR-32UT precision rotation stage is a low profile rotary table with a high-speed direct-drive rotary servo motor. The 32 mm center aperture and lightweight construction makes this rotary stage an ideal choice for handling 300 mm silicon wafers for semiconductor processing
ACR-32UT has a very wide dynamic speed range and can move at sub-rpm speed with low velocity ripple and can accelerate quickly to 1,500 rpm. This stage can be easily installed into IntelLiDrives low profile open frame XY tables with a minimal stack-up height to minimize Abbe error.
These features make the ACR-32UT outperform the stability, acceleration and settling speed of traditional servo motor gear-driven mechanisms, according to the company. IntelLiDrives offers a wide range of servo amplifiers and advanced controllers to provide a complete, integrated package.
| System Performance | Unit | ACR-32UT |
| Center aperture | mm | 32 |
| Outside diameter | mm | 116 |
| Stage height | mm | 22 |
| Peak Torque | Tp
(Nm) |
15 |
| Continuous torque
air cooling, coil 120°C |
Tc120
(Nm) |
5 |
| Peak current at Tp | Amp p rrms | 15 |
| Continuous current at Tc | Amp c rrms | 4 |
| Recommended voltage (note 1) | Uvdc
Uvac |
310
220 |
| Max speed
(note 2, 3) |
RPM | 1,400 |
| Positioning resolution
(note 3) |
counts/rev
|
3,600,000 (standard)
7,200,000 (optional) |
| Positioning resolution | (arc-sec) | 0.60 |
| Accuracy | Arc-sec | <10 |
| Repeatability | Arc-sec | <1 |
| Run-out axial/radial | micron | <10 |
| Rotor Inertia | kg x m2 | 0.05 |
| Stage weight | M (Kg) | 3
> |
| Axial load | M (Kg) | 10 |
Note 1: Rotary table can operate at lower voltages with lower speeds
Note 2: Max speed shown with no external torque applied
Note 3: Max speed may be limited by controller’s encoder frequency input.
Sin/cos 1 Vpp and other encoder resolutions available.
Contact the factory.
For additional information CLICK HERE!
For Youtube video CLICK HERE!
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About IntelLiDrives
IntelLiDrives, Inc. manufactures linear actuators, XY tables and rotary tables for the industry, government, science and research institutions around the world. Our precision rotary actuators, XY stages and linear actuators are used in the applications in medical devices, life sciences, semiconductor and electronic assembly manufacturing, data storage, laser processing, military/aerospace, photonics, automotive and test assembly, research and development and other industries requiring high precision and throughput motion control solutions.
For further information on this new product or others in our extensive product portfolio, call 1-215-728-6804 or e-mail Intellidrives at sales@intellidrives.com.com or go Intellidrive – Contact Us at: www.intellidrives.com/contact-us
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