Motion Control – Introducing the World’s Most Compact 1500 Watt Integrated Servo Motor!

Motion Control –  1500 Watt Integrated Servo Motor!

motion control - integrated servo motor

JVL presents a new AC Servo Motor with built-in controller, Nano-PLC and direct AC mains supply with same capacity and length as traditional servo motors.

 


motion control - electromateVaughan, Ontario, Canada — Motion Control Products — JVL, the European leader in the development of integrated servo and stepper motor technology, has now again developed a new and unique product in the field of integrated motor control.

New Compact Motor

The MAC1500 motor sets completely new standards for the performance and size of servo controls. With a length of only 182mm for a 1500W motor with a torque of 4.78/14.3 Nm at 3000rpm, this MAC motor matches the size of traditional servo motors without built-in controllers with flange 130x130mm. This has only been possible through the use of extremely compact motors and the development of electronics and mechanics that utilise the latest technologies and manufacturing methods. So what about vibrations and temperature? As with the other integrated servo motors in the range (50-4500W), both the motor and all electronic components have been specifically selected to withstand the rigorous demands required by industrial use.

Motion Control Integrated Stepper Motor with EtherNet Available from Servo2Go!

Motion Control – Integrated Stepper Motor with EtherNet

motion contro - integrated stepper motor

Greenville, DE — Servo2Go is pleased to offer integrated drive+motors from Applied Motion Products to our line of Ethernet and EtherNet/IP motion control products

The new STM23 models fuse a high performance motion controller with 100 MBit Ethernet communications to a high torque NEMA23 step motor. Connecting to an Allen-Bradley ControlLogix, CompactLogix or MicroLogix PLC? EtherNet/IP is also available.

motion control - components

The STM23Q-2Ex provides 125 ounce inches of torque, while the longer STM23Q-3Ex produces 210 ounce inches. Both models are available with an optional 4000 count/rev optical encoder, safely housed inside, that can detect and prevent motor stalls using Applied Motion’s proprietary stall prevention algorithm.

Motion Control – Low Cost, Highly Reliable Solenoid Control Modules Available from OES!

Motion Control – Solenoid Control Modules
motion control solenoid modules

Van Nuys, CA – — Motion Control Components– – Optimal Engineering Systems, Inc. (OES) offers seven types of advance solenoid control modules including: Pick-and-Hold Driver, Proportional (PWM) Driver, Closed Loop Solenoid Process Control, Pick-and-Drop, Load On-Off Power Cycling, Dual Proportional Valve Controller, and Serially Controlled Solenoid Driver modules. Applications of these compact modules measuring just 3.000 in. x 3.000 in. include: Solenoids, valves, actuators (including Voice Coils), DC motors, electromagnets, hydraulics, LEDs, power amplifiers for electro-pneumatic proportional valves, and pressure and flow control valves.

 

motion control - oes

To precisely fit an application there are multiple variations of each of the seven basic types of modules listed above to select from, for example: Single device – low side driver, two device – low side driver, single device – selectable low and high side driver, two device – selectable low and high side driver, +50 VDC or +80 VDC versions, currant versions, serially controlled, and Bi-directional load cycling versions to name just a few.

Motion Control – Customizable Lintech 100 Series Screw Driven Linear Stages That Ship In 1 Week Are Available from Electromate!

Motion Control – Custom Linear Stages

Lintech’s 100 Series Positioning Tables set the standard for high performance and value. 
motion control linear stages
 

 

 

 

 

 


Vaughan, Ontario, Canada — Motion Control Components –

Acme Screw or Ball Screw Driven Linear Motion:

The Lintech 100 series linear positioning slides are designed to maximize performance while minimizing physical size and cost.
motion control electromate robotics
These linear slides use a low friction, preloaded, recirculating linear ball bearing system, which ride on precision ground linear square rail guide.

Motion Control – Steinmeyer Miniature Ball Screws: Widest Size Selection in the Industry!

Motion Control – Miniature Ball Screws

motion control - miniature ball srews

Woburn, MA –Motion Control – We are very proud of our miniature screw product line. It features shaft diameters down to 3 mm, and pitch down to 0.5 mm. All of our screws are available with either cylindrical, threaded or flanged nuts, or a custom nut of your own design.

 

motion control - steinmeyer

Miniature ball screw drives are primarily used in the semiconductor industry, as well as in optical, medical and measurement engineering applications. Our portfolio of miniature ball screw drives offers a total of 5 different nut shapes for your mounting design. The nuts can be provided either with preloading (for zero backlash) or axial play. They can be combined with two standard types of shafts or a custom shaft. Ground recirculating ball screws are available in accuracy classes P1 to P5. Rolled versions with lower accuracy exist starting from a minimum nominal diameter of 8 mm.

Special versions, for example for clean room applications or vacuum engineering, are available upon request. Our experience and proven quality is evident here too.

Motion Control Tutorial – Slotted vs. Slotless Motor Technology

Motion Control – Tutorial Motor Technology

Motion Control Tutorial – When first introduced, brushless DC motors, despite their many advantages, were cast as a costly alternative to brush-commutated motors and were typically only specified for low-power applications where long life was the primary desired requirement. Without the mechanical brush-commutator mechanism that would wear and eventually result in motor failure, brushless motors could be relied upon to deliver performance over time. As for other advantages, conventional wisdom held that brushless motors provide high speed and fast acceleration, generate less audible noise and electromagnetic interference, and require low maintenance. Brush-commutated motors, on the other hand, would afford smooth operation and greater economy. In the past decade, though, brushless motors have gained broader appeal and greater acceptance in industry for a wider range of applications previously dominated by brush-commutated products, due in part to dramatic reductions in the cost and size of electronic components and advances in motor design and manufacturing.

motion control Tutorial
motion control - tutorial

At the same time, manufacturers have further sought to challenge conventional wisdom by improving brushless motor design in an effort to combine the traditional advantages of brush-commutated and brushless types. A noteworthy example of how far these innovations have progressed involves the slotless (instead of slotted) construction of the brushless motor’s stationary member, or stator.

Motion Control – Optimal Engineering Systems, Inc. (OES) Introduces New, Motorized, High Resolution Pan-Tilt Stages!

Motion Control – Pan-Tilt Stage
motion control pan tilt stage

Van Nuys, CA – — Motion Control – High Resolution, Motorized, Pan-Tilt Stages have been added to the extensive line of OES (Optimal Engineering Systems, Inc.) motion control products. These motorized Pan-Tilt Stages are available in two sizes. The PT60-1 Pan-Tilt Stage is a combination of two 60 mm (2.362 in.) rotary stages and the PT100-1 is a combination of two 100 mm (3.937 in.) rotary stages, set at a 90O angle to each other. The rotary stages of each Pan-Tilt stage features a high repeatability of 0.005O (18 arc-sec), a positional accuracy of 0.005O (18 arc-sec), and a resolution of 0.001O = 3.6” (10 Micro-steps per Step Motor Driver in use).

motion control - oes

These Pan (horizontal table)-Tilt (vertical table) Stages are deal for: Scanning, testing, inspection, assembly, positioning, laser and micro machining, pointing optics and cameras, and other applications.

Motion Control – SMAC expands their electric actuator family to include the New LBR40 Series Linear Rotary Actuator!

Motion Control – Linear Rotary Actuator!

motion control - linear rotary actuator

 


motion control - electromate

 

 

Vaughan, Ontario, Canada — Motion Control Components — The LBR40 is a slim, stackable linear rotary actuator with a SMAC HT35 direct drive brushless motor. Encoder resolutions are available from 5 micron to 1um for application flexibility to optimize on position control. Priced competitively with the added benefit of real time feedback of data required to assure quality. IP67 protection is available as well as a built-in controller with popular communication protocols.

Motion Control – Hollow Core Voice Coil Motor Has Low Inertia, High Precision available from Moticont!

Motion Control – Hollow Core Voice Coil Motor!

 

motion control - Moticont voice coil motor

motion control - moticint

Van Nuys, CA — Motion Control – Moticont introduces an open aperture (hollow core) voice coil or moving coil linear motor from Moticont, the HVCM-051-025-013-01. Featuring an open aperture of 0.50 in. (12.7 mm) this low cost, clean room friendly non-commutated motor is available off-the-shelf. The light weight and low inertia moving coil of the linear actuator demonstrates: High acceleration/deceleration, high speed, zero cogging, and by connecting directly to the load, zero backlash.

Motion Control – Introducing the World’s Smallest Multi-Turn Absolute Kit Encoders!

Motion Control – Miniature Encoders

Miniaturized device features accuracy, robustness and a zero-maintenance rotation counter – all in a 22 mm diameter package

motion control miniature encoder

 

motion control electromate robotics

 


Vaughan, Ontario, Canada — Motion Control Components — Size matters, and in the world of industrial automation, providing exceptional performance in a highly compact package can be an enormous advantage. With this in mind, encoder manufacturer POSITAL has unveiled a fully functional prototype of their new miniature multi-turn kit encoder for integrated motor feedback. With a diameter of only 22 mm and a height of 23 mm (0.87”/0.9”), the new device is the world’s smallest multi-turn kit.

Motion Control – High Precision 60 mm Vertical Elevator Stages from OES!

Motion Control – Elevator Stages!

motion control - elevator stage

motion control - stages - custom

 

 

Van Nuys, CA – — Motion Control – The AT10-60-01, AT10-60-02 and the AT10-60-03 Motorized Elevator Stages have been released by Optimal Engineering Systems, Inc. (OES). The AT10-60-01 (shown) is driven by a Two-Phase Stepper Motor with micro-stepping capabilities. The repeatability is typically +/- 5 micron and typical positional accuracy is 15 micron. The knob for manual adjustment can be replaced with a Quadrature Incremental Optical Encoder for position verification.

Motion Control – AMC introduces the FE060-25-EM – FlexPro™ Digital Servo Drive!

Motion Control – Digital Servo Drive

Motion Control Digital Drive

 


motion control - electromate logoVaughan, Ontario, Canada — Motion Control Components — Available immediately, the FE060-25-EM is the first servo drive of the new FlexPro™ digital drive family from ADVANCED Motion Controls (AMC). Designed with compact form and power density in mind, the micro-sized FE060-25-EM can outperform larger-sized digital servo drives and still be integrated into tight spaces.

Motion Control – LDL25 Series Linear Actuator, available from Electromate, is a cost-competitive alternative to pneumatics!

Motion Control – Linear Actuator
motion control - electromate logo

Cost-competitive Alternative to Pneumatics, Starting at $300 US/ea

motion control - linear actuator

Vaughan, Ontario, Canada — Motion Control Components — The LDL has been designed as a cost-competitive alternative to pneumatics. A common trend in industrial automation is that users are looking for electric alternatives to their pneumatic components for a number of reasons: control, cycle life, operating cost and environment, etc. The LDL series actuator features several innovative cost reduction elements that result in a list price starting at $300 US.

Motion Control – Integrated Single and Multi-Axis Stepper Motor Controller and Driver Available from Optimal Engineering Systems, Inc. (OES)!

Motion Control – Integrated Stepper Motor Controller and Driver

motioncontrol - controller -stepper

Van Nuys, CA – — Motion Control – Optimal Engineering Systems, Inc. (OES) has introduced their new ICAD Series of integrated motion controllers and drivers for 2-phase stepper motors. Available as 1, 2, 3, and 4 axes modules (pictured) they are ideal for NEMA 8 to NEMA 42 stepper motors. These compact 6.000 in. x 8.000 in. plug-and-play, integrated controllers incorporate high resolution micro-stepping drivers for precise positioning.

Other features include home and limit switches per axis, joystick interface, TTL/CMOS inputs and outputs, quadrature encoder feedback, USB and optional Ethernet interfaces permits each module to be customized for specific applications. The ICAD series is powered from a single power supply up to +48 VDC. The high voltage power supply allows for high speed operation.

motion control - stage

Additional features of these ICAD Series modules include: Low power consumption, auto current reduction, high torque and high speed capabilities, serially or manually controllable, or host controlled. Modes of motion include: Point-to-point positioning, jogging, and coordinated motion.

Another option is to program the motion controller using an easy programing language and store the code in the flash memory for automatic operation. No compiler or assembler is required. User friendly software that allows for easy setup is included. Using the software, an operator can move each axis by using the control panel or a joystick.

About OES – Optimal Engineering Systems, Inc. (OES) is a manufacturer of motion control products including: Stepper motor controllers and drivers, solenoid electronics, and positioning stages and slides. Applications include: Animation, automated assembly systems, automation, CNC machines, flight simulation, inspection systems, linear and rotary stages, machine tools, medical devices, motion control camera boom systems, optical comparators, CMMs, pan-tilt gimbals, PCB assembly & inspection, pick-and-place, positioning stages, robotics, scanners, security cameras, telescope drive mechanisms, time-lapse photography and winders.

Some of the industries OES serves are: Aerospace, Astronomy, Chemical, Communications, Educational Institutes, University, Colleges, Government Agencies, National Labs, Manufacturing, Medical, Metrology, Military, Motion Control, Museum, News Agencies, Semiconductor and Test Equipment. Optimal Engineering Systems, Inc’s. competitive advantage is its state-of-the-art in-house manufacturing facility in North America enabling OES to supply clients with custom designed orders or high volume just-in-time deliveries globally.

For additional information, contact sales team at: OES, 6901 Woodley Ave.; Van Nuys, CA 91406; Telephone: 888-777-1826 or +1 818-222-9200, FAX +1 818-436-0446 or E-Mail: sales@oesincorp.com or visit the website at http://www.oesincorp.com


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Motion Control – Harmonic Drive Releases New HPN-RA Harmonic Planetary Right Angle Value Series Gearhead available from Electromate!

Motion Control – Harmonic Drive Right Angle Series Gearheads

motion control - harmonic drive

 


motion control - electromate logoVaughan, Ontario, Canada — Motion Control Components — The popular HPN Harmonic Planetary® value series from Harmonic Drive LLC is now available in a right angle configuration. The HPN-RA provides a low cost solution without the need to compromise on quality or performance.

The HPN-RA Series features helical gears for High –Torque, quiet performance and long life. Backlash of <6 arc minutes (for single stage) is maintained for the life of the gear. Large radial ball bearings support the output shaft for high load capacity. HPN-RA Harmonic Planetary® gears are available with a smooth output shaft or a shaft with a key and tapped center hole.

The HPN-RA gearheads are available with short lead times and are designed to couple to any servo or stepper motor with our Quick Connect® mounting system.

Features include:

  • Spiral bevel right angle gear set with planetary output
  • Helical Gearing
  • Available in 5 Frame Sizes • Peak torque: 9Nm to 752Nm
  • Ratios, 3:1 to 50:1
  • High Efficiency • Backlash <6 arc-min (single stage) ,<9 arc-min (two stage)
  • Grease lubricated for life
  • Competitive price levels with short lead times
  • Shaft output available with key and center tapped hole or with center tapped hole

Information on the HPN-RA Harmonic Planetary Right Angle Gearhead from Harmonic Drive LLC can be viewed at:

https://www.electromate.com/pub/media/assets/catalog-library/pdfs/harmonic-drive/harmonic-drive-hpn-ra-brochure.pdf

About Electromate:

Electromate’s Core Purpose is to help Manufacturers build better machines using differentiated automation technology. They specialize in Robotic and Mechatronic Solutions for the Industrial Automation marketplace. Respected by customers as a premiere source for High Performance Automation and Motion Control Components & Systems, Electromate® specializes in AC & DC Servo and Stepper Motors & Drives, Motion & Automation Controllers, Positioning Systems & Actuators, Feedback Devices, Gearing Products and HMI’s & Operator Displays, all supported via extensive product selection, just-in-timedelivery, dedicated customer service and technical engineering support.

More on Electromate can be found at

Website: http://www.electromate.com

LinkedIn: https://www.linkedin.com/company-beta/209277/

Twitter: https://twitter.com/Electromate

Facebook: https://www.facebook.com/electromateindustrial/

Blog: https://electromate.wordpress.com/

 

motion control - best place to work

For more information on the “Best Place to Work”CLICK HERE!

To view Electromate’s new corporate video CLICK HERE

 

 

 

For further information on this new product or others in our extensive product portfolio, call 1-877-SERVO99 (737-8699) or e-mail Warren Osak at sales@electromate.com or visit Electromate at: www.electromate.com

 


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Motion Control – Miniature 5/8 of an Inch Diameter Voice Coil Motor with Built-in Shaft Has High Speed, High Acceleration, and High Force to Size Ratio!

Control – Miniature Electric Cylinder

motion control - electric cylinder

Van Nuys, CA — Motion Control – Moticont’s GVCM-016-010-01 Miniature Linear Voice Coil Motor (Linear DC Motor) has a high force to size ratio with 5.0 oz (1.4) continuous force and 15.7 oz (4.4 N) of peak force with a housing measuring just 0.625 in. (15.9 mm) dia. by 0.375 in. (9.5 mm) long.

motion control - moticint

This motor features high acceleration/deceleration, high speed, high reliability, zero backlash and a 0.125 inch (3.2 mm) stroke length. This very small brushless servo motor is an ideal low cost replacement for pneumatic linear actuators.

Motion Control – Steinmeyer Celebrates 100 Year Anniversary!

Motion Control – Steinmeyer 100 Year Anniversary!

motioncontrol - ball screws

Woburn, MA, USA, – Steinmeyer, the German-based maker of precision ball screws, marks its 100-year anniversary in 2020. The company was founded by August Steinmeyer in 1920 as a precision thread grinding shop and soon began producing micrometers as its first product. In 1965, Steinmeyer began manufacturing its signature product, precision ground ball screws.

motion control - Steinmeyer

Today, it employs over 400 workers at its Albstadt, Germany headquarters, the site of its founding. Steinmeyer now crafts an expansive line of ground, rolled and aerospace ball screws that are used in a wide range of linear motion applications.

The internationally recognized company has now grown to three divisions, bringing its total employment 680. Steinmeyer Mechatronik makes custom motion systems, and Feinmess Suhl makes custom metrology systems.

Said Bruce Gretz, Executive Vice President of Steinmeyer’s North American subsidiary, “We are proud to be part of a legacy that looks back on 100 years of tradition.”

Please contact Bruce Gretz at 781-273-6220 or bruce.gretz@steinmeyer.com for more information.

 

About Steinmeyer

Steinmeyer is the world’s longest continuously operation manufacturer of brecision ball screws. In the realm of linear motion control, our company has become synonymous with precision, innovation, and exacting standards of quality. As an added value, we offer custom linear modules from our highly and experienced Mechatronik division. We also have a long history making precision lead screws and offer one of the most innovative and diverse product lines in the world.

Designed and manufactured in Germany, our products are used globally in machine tool, medical devices, lab instruments, optics and many other mechatrinic applications. Steinmeyer engineers will work closely with you to customize our offering to deliver a solution that meets your technical requirements and budget.

Contact Steinmeyer for further information on their extensive product portfolio:

781-273-6220

infoUSA@steinmeyer.com

Visit steinmeyer.com/

Steinmeyer Ball Screw Resource Center


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motion control - Steinmeyer

 

 

Motion Control – NEW! High Speed Integrated Bearing and Drive System Features +/- 5 Microm Repeatability!

Motion Control – High Speed Integrated Bearing and Drive System

motion control - high speed drive system
motion control - lm76

E. Longmeadow, MA –Motion Control – LM76 is the Exclusive North American Distributor of a new high speed integrated bearing and drive system featuring +/- 5 micron repeatability, and zero backlash! This new X-Axis BE125-10 Open Screw Drive System sets new standards for: Length of travel, speed, and precision for Cartesian Robots (robots that move in X,Y and Z axes according to Cartesian Coordinates also know as rectangular coordinates) and single axis linear stages!

The new X-Axis BE125-10 Open Screw Drive System is a compact linear stage measuring 125 mm (4.921 in.) wide x 86 mm (3.386 in.) high x 4391 mm (172.874 in.) long and can handle dynamic loads to 500 kg (1102 lbs). The standard stroke length is 4000 mm (157.480 in.) and custom stroke lengths to 10 m (32.8 ft) can be specified.

This new drive system consists of a precision ground open screw and two pre-loaded radial ball bearings additionally the open screw drive system is supported by bearings spaced every 250 mm that prevent screws as long as 10 m from whipping even at 5000 rpms. This is in contrast to a closed screw system (ball screw and nut) which are more limited as to length of travel and rpms.

Shafting options include: Solid and hollow Class L RC60, 300 series stainless steel in lengths to 12 feet. FDA/USDA/3A-Dairy compliant, shafting features: Excellent corrosion and chemical resistance, custom machining to print, pre-drilling and assembly.The guide system consists of two parallel shafts and 8 preloaded radial bearings. In addition to smooth motion, low vibration, low noise (less than 68db at 3000 rpm), and minimal heat generation the BE125-10 Open Screw Drive System is capable of travel speed up to 1.7 m/sec (5.5 ft/sec). and pitch and yaw accuracy over 4000 mm (157.480 in.) of travel is just +/- 0.02 mm (0.00079 in).

Get the high precision X Axis BE125-10 Open Screw Drive System for higher throughput, and guaranteed longer life in: Pick-and-place, sorting, packaging, assembly, machining, and testing applications. This complete linear stage and drive system is easily integrated in new and existing applications.

To follow the NEW Series from LM76, THE ENGINEERING EDGE! and learn about interesting Outside-of-the-Box solutions developed by LM76 to solve some interesting linear motion problems! CLICK HERE

About LM76  – Founded in 1976, LM76 has been a leading designer/manufacturer of linear bearings, slides and linear motion systems. LM76 is renowned for its industry leading Minuteman PTFE Composite linear bearings. LM76 is a leading supplier of precision linear shafting: RC60, 300 Series Stainless Steel, and ceramic-coated aluminum shafting. LM76 also offers several FDA/USDA compliant linear bearings and slides for the food processing, pharmaceutical, medical, and packaging industries.

For additional information contact Mike Quinn at: LM76, 140 Industrial Dr., E. Longmeadow, MA 01028; Telephone: 413-525-4166, Fax: 413-525-3735 or E-Mail: mquinn@lm76.com or visit the website at http://www.lm76.com

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motion control - lm76

 

 

Motion Control – Miniature 5/8 of an Inch Diameter Voice Coil Motor with Built-in Shaft Has High Speed, High Acceleration, and High Force to Size Ratio!

Motion Control – Miniature Voice Coil Motor

motion control - linear actuator


motion control - moticont
Van Nuys, CA — Motion Control – Moticont’s GVCM-016-010-01 Miniature Linear Voice Coil Motor (Linear DC Motor) has a high force to size ratio with 5.0 oz (1.4) continuous force and 15.7 oz (4.4 N) of peak force with a housing measuring just 0.625 in. (15.9 mm) dia. by 0.375 in. (9.5 mm) long. This motor features high acceleration/deceleration, high speed, high reliability, zero backlash and a 0.125 inch (3.2 mm) stroke length. This very small brushless servo motor is an ideal low cost replacement for pneumatic linear actuators.

Also called an Electric Cylinder, this linear actuator has a threaded 2-56 UNC-2A shaft for a backlash free connection. The housing and coil each have 2 2-56-UNC-2B threaded mounting holes on 0.25 in (6.35 mm) centers. The built in centered shaft facilitates the commissioning of the motor for easy integration into current and future applications.

This clean, quiet, efficient, low inertia, high reliability actuator is ideal for: Heptic feedback and pipetting in medical devices, switch activation, testing, sorting, assembly equipment, work holding and clamping, scanners and laser beam steering and filtering, laser, machining and drilling, optical focusing, and dynamic vibration absorption. Moticont also offers DC and servo motor drivers.

Is there a need for a higher force or longer stroke? There are currently 7 series of Moticont GVCM motors based on diameter of this motor.

To find the right motor for you application go to: http://moticont.com/linear-motor-with-bearing.htm

 

About Moticont – Moticont is a manufacturer of motion control products. Their product line includes voice coil motors, three phase brushless motors and positioning stages and slides.

Moticont is committed to exceeding their customers’ quality expectations and industry standards throughout the design, manufacturing, service and technical support phases. Their modern manufacturing facility, highly controlled processes, committed staff, and extensive testing complement their product design strengths. This enables them to supply their clients with specialized small orders to high volume just-in-time deliveries.

They offer an extensive line of standard products ready to be shipped immediately from stock, and when standard products are not quite right for an application, highly trained design engineers are always available to develop custom motion control products to fit the specific needs or our customers.

For additional information contact Sales Team at Moticont, 6901 Woodley Ave, Van Nuys, CA 91406; Toll Free: +1 (888) 785-1804, Tel: +1 (818) 785-1800, moticont@moticont.comor visit the website at http://www.moticont.com


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motion control - moticont

 

 

Motion Control – Case Study: Custom Linear Modules – Lithography Masking!

Motion Control – Custom Linear Modules

motion control - custom stages

motion control - steinmeyer

 

 

 

 

 

Woburn, MA –Motion Control Components Ball Screws – Case Study –
Multi-Axis Motion for Lithography Masking

Challenge

A leading supplier of laser processing equipment to the semiconductor industry wanted a next generation masking system for extreme UV lithography. The customer approached Steinmeyer with a demanding set of requirements. The motion system needed flexibility to provide fine adjustment during processing and coarse movement into a service position outside the optical path. Travel of 160mm was required in the horizontal axis and 50mm in the vertical axis, with speeds up to 50mm/sec and repeatability of better than 2 microns. The mask also needed to tilt as much as 1.5 degrees around the optical axis. Finally, the dry nitrogen atmosphere and strict boundaries on contamination levels made the choice of materials and lubricants challenging.

 

Steinmeyer Mechatronik, a division of Steinmeyer, designed an innovative multi-drive configuration. It features stainless steel, 12 x 5 preloaded ball screws. Two vertical drives enable both translation and tilt. A stage supporting both vertical drives moves the mask horizontally. The mask frame with the associated pivot points are magnetically preloaded, which enables easy service plus backlash-free tilt. Further, the motor encoder assembly is easily detachable for quick servicing.

motion control - Ball screws

motion control - Steinmeyer

Special design elements regarding coatings and ball screw lubricants were also incorporated to address demands unique to this application. An eUV absorbent coating was applied on all internal surfaces to minimize signal scattering. Also, a highly specialized lubricant was selected. This PFPE oil is chemically stable under eUV exposure while exhibiting extremely low outgassing. It is also thermally stable, nonflammable, and insoluble in water, acids, bases, and most organic solvents.

 

To Download a PDF of this Case Study Go To – https://ballscrew-tech.com/2019/06/27/case-study-multi-axis-motion-challenge-solved-by-innovative-ball-screw-design/

 

The Result

The customer completed the full acceptance testing of the system. They are thrilled by the combination of coarse and fine movement in one mechanism. Plus, the system greatly speeds their process of mask testing.

motion control - steinmeyer ball screws

About Steinmeyer

Steinmeyer is the world’s longest continuously-operating manufacturer of commercial ball screws. In the realm of linear motion control, our company has become synonymous with precision, innovation, and exacting standards of quality.

Steinmeyer’s extensive product line is used widely in drive systems for industrial machines as well as precision positioning in optical instruments, medical devices, and other mechatronic applications.

Contact Steinmeyer for further information on their extensive product portfolio:

781-273-6220

infoUSA@steinmeyer.com

Visit steinmeyer.com/

Steinmeyer Ball Screw Resource Center

 

Other Interesting Case Studies from Steinmeyer:

For the Case Study “Wearable Pumps” CLICK HERE

For the Case Study “Pipetting” CLICK HERE


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